High-vacuum tube furnaces are available in multiple sizes with a broad range of tube lengths and diameters. Offered in temperature ranges up to 1600°C, they can be configured with fully automated control of back-fill gases, roughing and temperature control. A touchscreen PLC is available with recipe programming of all available functions. Vacuum is provided by an oil-free diaphragm pump and turbomolecular pump capable of 10-5 mbar vacuum in a clean, empty work tube. Water-cooled end seals and a recirculating chiller regulate the temperature of the tube ends, and the process tube connects to the vacuum system with stainless steel bellows clamped to one of the tube end seals. Gas flow is controlled by mass flow controllers connected to the PLC and coordinated by the recipe program.