MKS Instruments
The 902B Absolute Piezo vacuum transducer integrates an MEMS-based Piezo sensor with a metal-sealed, stainless steel 316 diaphragm and integrated electronics to provide seamless, gas-independent vacuum pressure measurement between 0.1 and 1,000 torr. It features up to three set-point relays and a reduced process cycle time due to the sensor’s accurate and repeatable pressure measurements. The sensor is suited for applications including vacuum furnaces and for use in the automotive and aerospace industries.