A new chiller-technology-based aluminum nitride (AlN) ceramic heater with an embedded tungsten RTD sensor is capable of heating from 100 to 450°C at 200°C per second and cooling from 450 to 100°C at 100°C per second. This performance is based on multilayer monolithic ceramic technology that may include heaters, cooling microfluidic, RTD sensors, ground planes and other layers. The high thermal conductivity and low-temperature expansion properties of AlN enable the fast temperature response.