E-beam Source

The ULTRA SOURCE e-beam source for EB-PVD (electron beam-physical vapor deposition) application retains all the advantages of the original Sloan e-beam source, including large hearth capacity, high deposition rates, long filament life and industrial reliability, but has been re-engineered for improved productivity and uptime. With the ULTRA SOURCE there is no longer any need to disconnect water fittings when disassembling the source for routine maintenance. All wear surfaces are now stainless steel instead of copper. Water leaks caused from removing the hearth have been eliminated. The ULTRA SOURCE features large pockets, interchangeable crucibles, a 270-degree bent beam design for longer filament life and XY sweep capability.