The MEMS Pirani gauge offers a cost-effective, rugged and reliable solution to vacuum measurement from atmosphere down to 1x10-4 Torr.

Pirani Gauge

The MEMS Pirani gauge offers a cost-effective, rugged and reliable solution to vacuum measurement from atmosphere down to 1x10-4 Torr. It uses advanced MEMS technology and lock-in AC signal processing in its integrated electronics, which results in reliable and precise measurement. Digital field calibration, any orientation mounting and optional rear sensor port add to the flexibility of this gauge.