PVD Deposition System

The UNIVEX line of universal experimentation PVD vacuum coating systems is designed for use in research and development and pilot production applications. Available in configurations of varying chamber capacities utilizing bell jars, stainless steel box chambers and cluster tool configurations, UNIVEX is offered with many standard features and options, including: high-vacuum pump systems, power supplies, PLC, a variety of substrate holders, film thickness and vacuum measurement, cooling and heating systems, feed-throughs, view windows and gas admission. Various models of thermal and electron beam evaporators, DC and RF sputtering sources, organic evaporators and load-lock versions are available. UNIVEX is available for use in all vacuum PVD coating processes.