Helix Technology Corporation
The Granville-Phillips Series 354 Micro-IonR modules are available with the DeviceNetT interface. The modules feature an all-metal ionization gauge that is smaller, more rugged and useful over a pressure range from 10-9 to 5 x 10-2 torr. They are suitable for vacuum measurement applications where front panel controls are not required and a system computer provides overall system control.
July 6, 2000