The GDS850A glow discharge optical emission spectrometer (GD-OES) enhances performance requirements for process control and R&D investigations. Features include continuous profile of concentration/thickness, large dynamic range with concentrations from ppm to 100% by weight, short analysis time (minutes), True Plasma PowerT for running non-conductive material samples, and SmartLineT service support. The unit determines chemical composition, thickness of coatings, homogeneity of coatings, surface and interface contamination, ad-herence issues, and correction of process parameters.
Optical Emission Spectrometer
September 5, 2000