Ricor Cryogenic & Vacuum Systems
The product range includes sizes from 4" to 12" with compressors to match. They provide clean, fast pumping for many semiconductor and general vacuum applications such as sputtering and lens coating. CoolstarR cryo pumps use a stepper motor that allows the pump to cool down faster by running the motor faster during cooldown periods, and extends seal life by running the motor slower during low cooling demand. Cool-starR pumps are capable of operating in harsh applications due to their simple rugged design.
October 3, 2000