Pfeiffer Vacuum

The high-capacity, high-throughput turbo pumps are designed for high particulate processes in the semiconductor, glass, industrial coating and R&D applications. The turbo pumps have a combination of pumping speeds from1,200 to 2,100 l/s and throughput up to 2 standard l/min. The rotor/bearing design provides reliability with MTBF better than 200,000 hours. The pumps are designed and tested to operate safely even after sudden stops. All pumps use the same integrated controller with interchangeable peripherals and cables and are available with IP54 rated integrated power supplies in a wide range of configurations.