The CRM-RD3 and CRM-RD4 cylindrical rotary magnetron cathodes are developed specifically for R/D and batch production applications. They utilize target backing plates that are 3 or 4 inches ID and from 12 to 30 inches long. The CRM type cathodes are based on the same technology used in the much larger CRM-6 and -8 industrial models available from the company. The cathodes provide target utilization of up to 85% and a higher inventory of target material than an equivalent width of planar magnetron cathode. Some applications include tool coating, small web coaters, and thin film resistor coaters as well as a wide range of development applications.
Cylindrical Rotary Magnetrons
September 5, 2000