MKS Instruments Inc.-HPS Products
The HPS(r) Electromagnetic Cv(tm) valve is designed for a variety of high-vacuum processes, and is well suited for applications requiring a simple, compact solenoid actuated valve to control gas flow. While it is primarily used for gage or system isolation, the valve may also be used as a venting, bypass or roughing valve. Actuation is performed by a dc electric supply electromagnetic solenoid, eliminating the need for a pneumatic system. The valve can isolate the sensor from the chamber while venting to atmosphere. The valve also includes a coil saver circuit integrated with the input power supply.
January 11, 2004