MKS Inc. - HPS Products
The HPSR Series 901 loadlock transducer (LLT) combines a vacuum gauge (MicroPiraniT) and an atmosphere switch (Piezo) into an integrated, compact package. The Piezo differential pressure sensor operates properly under varying outside environmental pressures ensuring the loadlock door opens at the optimal time. The element in the MicroPiraniT portion of the unit consists of a 1mm2 silicon chip, allowing small volume measurements. The transducer has a range from 1,000 to 10-5 torr and can detect medium to fine leaks in a vacuum system.
September 7, 2001