BOC Edwards Releases New Controller for Special Gas Delivery Systems
October 15, 2001
BOC Edwards, Wilmington, Mass., released its intelligent Gas Source Controller (iGSC), an automatic controller specifically designed for delivering special gases into ultra high purity applications, like the semiconductor manufacturing process. It is available for use on traditional gas cabinets for cylinder gases, valve manifold boxes (VMBs) and bulk special gas systems (BSGS). The first units were shipped to a Taiwan semiconductor foundry in June.