The CS-5000 combination instrument analyzes precision forms and surface roughness parameters in a single unit. A rigid base and column construction integrated with a patented x-axis guide way eliminates pitch, yaw, rotation and straightness errors. At 68¿F (20¿C), the x-axis accuracy is (0.012 + 2L/40) microinch or (0.3 + 2L/1000) Km. Resolution is 6.25 nm. The detector includes Laser-Hologage measuring technology having 2.0-nm resolution. Resulting accuracy in the z\i>-axis is I(0.012 + |2H/4|) Km or I(0.3 + |2H/100|) Km.