Heated Vacuum Valves
July 31, 2002
MKS Instruments Inc., Boulder, Co., published a revised brochure on the HPS(r) line of Jalapeno heated vacuum valves. The 12-p brochure includes applications, a technical overview, specifications, dimensions, part numbers and pricing. The valves are designed for use in manufacturing processes like low-pressure chemical vapor deposition in semiconductor fabrication where production byproducts can condense and build up.