Kurt J. Lesker Co.
The SHPS8K controllers are closed-loop power supplies and digital temperature controllers that will power all types of heaters-PGG or PBN button substrate heaters. These autotuning programmable units are available for use in profiled substrate-temperature applications, and when used with the Neocera heater assembly, they provide stability of better than +/-1C (+/-2F).
Power Supply/Temperature Controllers
April 8, 2002