Aeronex and University of California Santa Barbara Collaborate Through Gas Purification Study
April 25, 2001
Aeronex, San Diego, Calif., has completed a study done in conjunction with the University of California Santa Barbara (UCSB) to determine how utilization of gas purifiers in the metal organic chemical vapor deposition (MOCVD) film growth process affects film performance. The one-year study, conducted by UCSB professors Steven Denbaars and Jim Speck, found that the Aeronex nitrogen purifier was as effective in nitrogen in removing oxygen and carbon bearing species as Palladium Cells were in hydrogen. The study concluded that when using an Aeronex gas purifier, nitrogen can be used to replace hydrogen as the carrier gas with no loss of film purity.