MKS-HPSR Products

The HPSR series 959 combination gauge controller operates a hot-cathode and Pirani-style sensor to measure pressure from over atmosphere to ultrahigh vacuum. It provides vacuum measurement from 10(-10) to 1,000 torr. Analog output, an RS232 port, and two setpoints provide fast system control, and a standard leak-detector function includes a digital display and variable beeper to assist in locating leaks within a system. The controller degasses the hot-cathode assembly by electron beam, with remote filament and degas control and pressure indication during degas.