Optimizing CVD process equipment and desposition parameters offers high-performance hard coatings at higher deposition rates with lower part distortion.
Thermal CVD hard coating, a process developed in the 1950s, is used to deposit hard ceramic coating materials on metallic substrates. Recently, the CVD hard-coating process has been optimized in a process called high-performance hard coating, which offers improved performance via a combination of several specific components and technical solutions. In the CVD process, different heterogeneous reactions and intermediate reactions occur between coating source materials and the steel surface to be coated. A thorough study of these complex chemical reactions and process mechanisms led to an optimization of process equipment and deposition parameters for HPHC. The result is a general change of almost all important deposition parameters, such as gas amounts and mixtures, concentrations and partial pressures of TiCl4 (the hard-coating metal source material) and other metal component sources together with their distribution in space and time.